簡介

RBF-580 復合真空計由兩個獨立的測量系統(熱陰極電離規和皮拉尼規)組成，測量信號以壓力的對數形式輸出。熱陰極電離(由皮拉尼控制)僅在壓力<2.4×10^-2mbar 下被激活，在2.0×10 ^-2 ...5.5×10 ^-3mbar 的重疊壓力范圍內，輸出兩個測量系統的混合信號；當壓力超過開關閾值（3.2×10 ^-2mbar ），則關閉熱陰極并輸出皮拉尼測量值。

 The RBF-580 compound vacuum gauge consists of two independent measuring systems (hot cathode ionization gauge and Pirani gauge) and the measurement signal is output in logarithmic form of pressure.The hot cathode ionization (controlled by Pirani) is activated only at pressures < 2.4 × 10 -2 mbar and outputs a mixed signal of the two measuring systems in the overlapping pressure range of 2.0 × 10 -2 . .5.5 × 10 -3 mbar overlapping pressure range, the mixed signal of the two measurement systems is output; when the pressure exceeds the switching threshold (3.2 × 10 -2 mbar ), the hot cathode is switched off and the Pirani measurements are output.

優點

• 從 5 x 10-10 mbar 至大氣氣壓（8 x 10-10 Torr 至大氣氣壓）的極其寬泛的測量范圍

Extremely wide measurement range from 5 x 10-10 mbar to atmospheric pressure (3.8 x 10-10 Torr to atmospheric pressure)

• 無需零點校準，零點校準在儀表運行過程中自動進行，不需要手動校準

 No need to zero calibration, zero calibration is performed automatically during instrument operation and does not require manual calibration    

• 傳感器配備了兩個相同的熱陰極燈絲，如果燈絲斷裂，儀表將立即反應并切換到第二根(未損壞)燈絲。
• 有三個單極單擲（常開）繼電器，可以配置為任何一個電壓輸出或配置為接地連接，具體取決于系統控制器的需要。

The sensor is equipped with two identical hot cathode filaments, and if the filament breaks, the meter will react immediately and switch to the second (undamaged) filament.

• 測量性能不受安裝方向的影響，實現工具設計的最大工程自由度

Measurement performance is independent of mounting orientation for maximum engineering freedom in tool design

應用范圍：

• 用于 5×10 ^-10mbar…1000 mbar 的壓力范圍內氣體的真空測量

Vacuum measurement for gases in the pressure range 5 x 10 -10 mbar...1000 mbar

• 對半導體過程和傳輸腔室的壓力測量

Pressure measurement of semiconductor processes and transfer chambers

• 工業鍍膜

Industrial Coating